Wide-Bandwidth MEMS-Scale Piezoelectric Energy Harvester

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This invention provides a wide-band resonating thin film PZT MEMS energy harvester that harvests energy from parasitic ambient vibration with a wide range of amplitude and frequency via piezoelectric effect. The new design utilizes the tensile stretching strain in doubly-anchored beams that exploits the nonlinearity of the stretching beam to enable a wide-band resonance and thereby a robust power generation amid the uncertainty of the input vibration spectrum. The device can be manufactured by a combination of surface and bulk micromachining processes. Applications: Energy harvester


Wide bandwidth and high power piezoelectric density energy harvesting.

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