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Solvent stabilization process and method of recovering solvent

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Disclosed is a method of thermally stabilizing an effluent stream from an industrial process such as a photolithographic process to allow thermally manageable recovery of the solvent. In the separation and recovery process the solvent is exposed to temperatures that can cause polymerization of the relatively small amounts of monomer still contained therein. This polymerization is an exothermic polymerization which can accelerate the polymerization of the remaining monomer potentially causing a thermally initiated exothermic run away polymerization. Run away thermally initiated exothermic polymerization can materially degrade the solvent. The thermally initiated run away exothermic reaction is inhibited by the inclusion of a thermal stabilizer or polymerization inhibitor.

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