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A method and apparatus for treating the surface of a substrate includes generating ozone in a generation chamber by using an optical source and transporting the ozone to a treatment chamber containing the substrate. The surface treatment utilizes an optical energy source and the generated ozone. The generation chamber and the treatment chamber are initially isolated from one another which allows for the selective regulation of delivering ozone from the generation chamber to the treatment chamber. Preferably a single optical source both generates ozone in the generation chamber and serves to clean and/or planarize the surface in the treatment chamber.
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